All Equipment
Lithography
| Equipment |
|---|
| AB-M contact aligner |
| YES III vapor prime oven |
| Solvent/Headway spinner bench |
| EMS Hotplate |
| TrioTech Hotplate |
| Laurell Spin Coater |
| CEE Spin Coater and hotplate |
Deposition
| Equipment |
|---|
| Amod Evaporator |
| Angstrom Sputter System |
| Modulab Evaporator |
| EvoVac Evaporator |
Etching
| Equipment |
|---|
| Oxford ICP |
| March 1703 |
| PVA Tepla Ion 10 |
| Harrick HP-001 High Power Plasma Cleaner |
Thermal Processing
| Equipment |
|---|
| ATV PEO 603 Oxidation Furnace |
| Modulab Oxidation Furnace |
| Modulab Phosphorus Diffusion Furnace |
| Lindberg/Blue Boron Diffusion Furnace |
Packaging
| Equipment |
|---|
| Microautomation 1006 dicing saw |
| K&S 4523AD Wedge Bonder |
| AML Wafer Bonder |
| Disco DAD 3221 Dicing Saw |
Metrology
| Equipment |
|---|
| Ambios XP2 |
| Filmetrics Profilm 3D optical profilometer |
| Filmterics F20 |
Wet Benches
Miscellaneous
| Equipment |
|---|
| MRL oxidation |
| Crest ultrasonic cleaner |
| COMSOL FEA |
| Flacktek DAC 330-100 SE Model Mixer |
| Mixer |