Equipment
Please follow this link to PDF manual download.
Lithography
| ABM contact aligner |
| YES III vapor prime oven |
| Solvent/Headway spinner bench |
| EMS Hotplate |
| TrioTech Hotplate |
| Laurell Spin Coater |
| CEE Spin Coater and hotplate |
Deposition
| Amod Evaporator |
| Angstrom Sputter System |
| Denton BTT - Thermal Evaporator |
| EvoVac Evaporator |
| Anric AT-410 ALD |
| ECSI Fibrotools IKO JR Electroplater |
Etching
| Oxford ICP |
| PVA Tepla Ion 10 |
| Harrick HP-001 High Power Plasma Cleaner |
Thermal Processing
Packaging
| K&S 4523AD Wedge Bonder |
| AML Wafer Bonder |
| Disco DAD 3221 Dicing Saw |
Photonics Packaging and Test
| Keyence VKX-3000 Laser Scanning Confocal Microscope and White Light Interferometer |
| Tresky T-5300 Component Placer and Flip Chip (coming July 2026) |
| KrellTech NOVA Polishing System (coming late April 2026) |
| Thorlabs Alignment and Assembly Station (coming early April 2026) |
| Semi-automatic Photonics Test Station (coming summer 2026) |
Metrology
| Filmetrics Profilm 3D optical profilometer |
| Filmetrics F3 |
| Dektak XTa Stylus Profilmeter |
| Ellipsometer |
Wet Benches
| Acid process wetbench |
| Cobleigh 523 General Use Wetbench |
| Cobleigh 525A General Use Wetbench |
| Barnard 107 Base Bench |
| Barnard 107 Solvent Bench |
Miscellaneous
| COMSOL FEA |
| Flacktek DAC 330-100 SE Model Mixer |
| Semiconductor Analyzer and Probe Station |