All Equipment
Lithography
| Equipment |
|---|
| AB-M contact aligner |
| YES III vapor prime oven |
| Solvent/Headway spinner bench |
| EMS Hotplate |
| TrioTech Hotplate |
| Laurell Spin Coater |
| CEE Spin Coater and hotplate |
Deposition
| Equipment |
|---|
| Amod Evaporator |
| Angstrom Sputter System |
| Denton BTT - Thermal Evaporator |
| EvoVac Evaporator |
Etching
| Equipment |
|---|
| Oxford ICP |
| PVA Tepla Ion 10 |
| Harrick HP-001 High Power Plasma Cleaner |
Thermal Processing
|
Equipment
|
|---|
Packaging
| Equipment |
|---|
| K&S 4523AD Wedge Bonder |
| AML Wafer Bonder |
| Disco DAD 3221 Dicing Saw |
Metrology
| Equipment |
|---|
| Filmetrics Profilm 3D optical profilometer |
| Filmterics F20 |
| Filmetrics F3 |
| Dektak XTa Stylus Profilmeter |
Wet Benches
| Equipment |
|---|
| Acid process wetbench |
| Cobleigh 523 General Use Wetbench |
| Cobleigh 525A General Use Wetbench |
| Barnard 107 Base Bench |
| Barnard 107 Solvent Bench |
Miscellaneous
| Equipment |
|---|
| MRL oxidation |
| Crest ultrasonic cleaner |
| COMSOL FEA |
| Flacktek DAC 330-100 SE Model Mixer |
| Semiconductor Analyzer and Probe Station |