Description

The Polos Hotplate is a lithography hotplate that features an in-built timer and a self-raising platform that allows for ease of wafer removal with tweezers upon completion. It is used for baking photoresists on wafers both before and after exposure. 

Restriceted Processes

  • SU-8
  • KMPR Series

Operating Manual

*Note that the instructions below may not contain the most recent updates. Please refer to the manuals printed and posted at the equipment.

  • The hotplate can operate at very high temperatures. Hotplate should be used with care to prevent burns.
  • The lid to the hotplate can close quickly. Ensure that lid is fully open and will not slam down on to hand or substrate. 

The Polos hotplate can be used on thin photo resist (AZ-Series, NR9).

The Polos hotplate is not approved for thick photo resists (SU8, KMPR) because they will damage the hotplate.

Quick Set Procedure 

  1. Press the power button to turn the unit on. 
    1. Prior to pressing the unit will display “OFF”
    2. After turning on the unit will display the current temperature of the hotplate.
  2. Press the SET button to put the hotplate into setpoint mode. 
    1. The green LED should light up and the current setpoint will be displayed. 
  3. Use the UP/DOWN arrows to change the setpoint. 
  4. Wait five seconds to allow the display to change back to the current temperature. 
  5. Allow the hotplate to reach setpoint temperature. 
    1. When the setpoint has been reached both the red and green led will be lit.
    2. To reach 200 C this should take 30 minutes with the lid closed and 45 minutes with the lid open. 
  6. After processing, leaving the hinged door open, press the power button to turn the unit off. 
    1. If the temperature is above 50 C the led display will flash back and forth between “HOT” and “OFF.”
    2. Cooling from 200 C to 50 C can take up to 3 hours. Lid must be open in order for the unit to cool down. 

Using the Timer 

  1. In order to set up a timer the hotplate must display “OFF” indicating OFF/Standby mode.
  2. Press the “SET” and UP button together until the green LED blinks. 
  3. Press the UP/DOWN buttons to adjust the alarm time. 
  4. Values may be between 1 and 999 seconds.
  5. To use the timer, go back to “Quick Set Procedure” and follow the instructions until the hotplate has reached the setpoint value. 
  6. Press the DOWN arrow button to start the timer. 
  7. The remaining time will be displayed. Upon completion the hotplate will make a tone. 
  8. Press the UP arrow button to cancel the timer. 
  9. Follow step 6 of “Quick Set Procedure” to shut down the hotplate. 

Using Programs 

  1. From the OFF/standby mode, use the UP/DOWN arrow buttons to check which Recipe is open and active (prefixed with a small o). 
    1. The hotplate can store 20 individual combinations of a setpoints and alarm (i.e. program o1 may be 150 C for 60 seconds) 
    2. At any given time one of these recipes is open. 

Shutdown and Cleanup

  1. Turn off Hotplate
Download Operating Manual and Procedures PDF