Lab Fees - New Rates Effective April 2026
Updated or New Policies
- According to federal guidelines, we are not allowed to use caps. Therefore, we cannot
have a monthly hard cap for academic usage or a monthly soft cap for industrial users.
We also are not allowed to cap the daily usage fees to a monthly max maximum.
- Academic access fee: $29/day.
- Commercial access fee: $132/day.
- We are now charging a small fee for optical microscopes.
- We now charge training fees based on hours rather than a fixed charge.
- * - If you are trained on one of these three tools, the training on the remaining two reduces to 1 hr each.
Unchanged Policies
- Use of the evaporation and sputter systems may include a setup charge if a target change is required.
- Material usage fees apply for Au and Pt.
- Time usage is billed in ¼ hour increments. Round your time fairly. For example, if you work for 20 minutes, recording ¼ hour is acceptable. If you work for 25 minutes, record the time in the logbook as ½ hour.
- We will assess a one-time fee for our two-hour in-person safety training. You will not be charged a daily access fee on your training day.
- Training fees will be assessed after the first training.
Daily Use Fee
- The daily usage fee is charged to the user for each calendar day on which the lab
is entered. You are not charged by amount of times entered, only each day.
- Academic access fee: $29/day.
- Commercial access fee: $132/day.
|
Equipment
|
Internal
|
External Academic
|
External Industrial
|
~Training time
|
|---|---|---|---|---|
|
ABM Contact Aligner
|
$55/hr
|
$82.50/hr
|
$110/hr
|
4 hrs
|
|
YES III Vapor Prime Oven
|
$41/hr
|
$61.50/hr
|
$82/hr
|
4 hrs
|
|
Solvent/Headway Spinner Bench
|
$61/hr
|
$91.50/hr
|
$122/hr
|
1 hr
|
|
Laurell Spin Coater
|
$61/hr
|
$91.50/hr
|
$122/hr
|
1 hr
|
|
Equipment
|
Internal
|
External Academic
|
External Industrial
|
~Training Time
|
|---|---|---|---|---|
|
Angstrom AMOD Evaporator
|
$69/hr
|
$103.50/hr
|
$138/hr
|
4 hrs
|
|
Angstrom Sputter System
|
$104/hr
|
$179/hr
|
$208/hr
|
4 hrs
|
|
Denton BTT - Thermal Evaporator
|
$94/hr
|
$145/hr
|
$188/hr
|
4 hrs
|
|
Angstrom EvoVac Evaporator
|
$69/hr
|
$103.50/hr
|
$138/hr
|
4 hrs
|
|
Anric AT-410 ALD
|
$45/hr
|
$96/hr
|
$135/hr
|
3 hrs
|
|
ECSI Fibrotools IKO JK Electroplater
|
$78/hr
|
$129/hr
|
$156/hr
|
3 hrs
|
|
Equipment
|
Internal
|
External Academic
|
External Industrial
|
~Training Time
|
|---|---|---|---|---|
|
Oxford ICP
|
$106/hr
|
$159/hr
|
$212/hr
|
4 hrs
|
|
PVA Tepla Ion 10
|
$68/hr
|
$148/hr
|
$148/hr
|
1 hr
|
|
Equipment
|
Internal
|
External Academic
|
External Industrial
|
~Training Time
|
|---|---|---|---|---|
|
ATV PEO 603 Oxidation Furnace
|
$84/hr
|
$126/hr
|
$168/hr
|
4 hrs
|
|
Modulab Oxidation Furnace
|
$84/hr
|
$126/hr
|
$168/hr
|
4 hrs
|
|
Modulab Phosphorus Diffusion Furnace
|
$84/hr
|
$126/hr
|
$168/hr
|
4 hrs
|
|
Lindberg/Blue Boron Diffusion Furnace
|
$84/hr
|
$126/hr
|
$168/hr
|
4 hrs
|
|
Allwin21 AccuTermo AW 610M
|
$84/hr
|
$126/hr
|
$168/hr
|
4 hrs
|
|
Equipment
|
Internal
|
External Academic
|
External Industrial
|
~Training Time
|
|---|---|---|---|---|
|
K&S 4523AD Wedge Bonder
|
$55/hr
|
$82.50/hr
|
$110/hr
|
2 hrs
|
|
AML Wafer Bonder
|
$76/hr
|
$152/hr
|
$152/hr
|
4 hrs
|
|
Disco DAD 3221 Dicing Saw
|
$96/hr
|
$144/hr
|
$192/hr
|
4 hrs
|
| Equipment | Internal | External Academic | External Industrial | ~Training Time |
|---|---|---|---|---|
| Keyence VK-X3000 Laser Scanning Confocal and White Light Interferometer | $62/hr | $93/hr | $124/hr | 2 hrs |
| Tresky T-5300 Chip Placement and Flip Chip Bonder | coming soon | |||
| KrellTech Nova Fiber and PIC Polisher | coming soon | |||
| Thorlabs PIC Assembly Station | coming soon | |||
| Semi-auto PIC Test | coming soon |
|
Equipment
|
Internal
|
External Academic
|
External Industrial
|
~Training Time
|
|---|---|---|---|---|
|
Filmetrics F3 Reflectometer
|
$62/hr
|
$93/hr
|
$124/hr
|
1 hr
|
|
Dektak XTa Stylus Profilometer
|
$35/hr
|
$52.50/hr
|
$70/hr
|
2 hrs
|
|
Angstrom Sun Ellipsometer
|
$62/hr
|
$93/hr
|
$124/hr
|
2 hrs
|
|
Jandell RM3 Four Point Probe
|
$45/hr
|
$67.50/hr
|
$90/hr
|
1 hr
|
|
Semiconductor Analyzer and Probe Station
|
$45/hr
|
$67.50/hr
|
$90/hr
|
2 hrs
|
|
Equipment
|
Internal
|
External Academic
|
External Industrial
|
~Training Time
|
|---|---|---|---|---|
|
Acid Process Wetbench
|
$70/use
|
$105/use
|
$140/use
|
1
|
|
Cobleigh 523 General Use Wetbench
|
$70/use
|
$105/use
|
$140/use
|
1
|
|
Cobleigh 525A General Use Wetbench
|
$70/use
|
$105/use
|
$140/use
|
1
|
|
Barnard 107 Base Bench
|
$70/use
|
$105/use
|
$140/use
|
1
|
|
Barnard 107 Solvent Bench
|
$70/use
|
$105/use
|
$140/use
|
1
|
|
Equipment
|
Internal
|
External Academic
|
External Industrial
|
~Training Training
|
|---|---|---|---|---|
|
Flacktek DAC 330-100 SE Model Mixer
|
$97/hr
|
$145.50/hr
|
$194/hr
|
0.5 hrs
|
|
Harrick HP-001 High Power Cleaner
|
$97/hr
|
$145.50/hr
|
$194/hr
|
0.5 hrs
|
