Updated or New Policies

  • According to federal guidelines, we are not allowed to use caps. Therefore, we cannot have a monthly hard cap for academic usage or a monthly soft cap for industrial users. We also are not allowed to cap the daily usage fees to a monthly max maximum. 
    • Academic access fee: $29/day.
    • Commercial access fee: $132/day.
  • We are now charging a small fee for optical microscopes.
  • We now charge training fees based on hours rather than a fixed charge.
  • * - If you are trained on one of these three tools, the training on the remaining two reduces to 1 hr each.

Unchanged Policies

  • Use of the evaporation and sputter systems may include a setup charge if a target change is required.
  • Material usage fees apply for Au and Pt.
  • Time usage is billed in ¼ hour increments. Round your time fairly. For example, if you work for 20 minutes, recording ¼ hour is acceptable. If you work for 25 minutes, record the time in the logbook as ½ hour.
  • We will assess a one-time fee for our two-hour in-person safety training. You will not be charged a daily access fee on your training day.
  • Training fees will be assessed after the first training.

Daily Use Fee

  • The daily usage fee is charged to the user for each calendar day on which the lab is entered. You are not charged by amount of times entered, only each day.
    • Academic access fee: $29/day.
    • Commercial access fee: $132/day.
Lithography
Equipment
Internal
External Academic
External Industrial
~Training time
ABM Contact Aligner
$55/hr
$82.50/hr
$110/hr
4 hrs
YES III Vapor Prime Oven
$41/hr
$61.50/hr
$82/hr
4 hrs
Solvent/Headway Spinner Bench
$61/hr
$91.50/hr
$122/hr
1 hr
Laurell Spin Coater
$61/hr
$91.50/hr
$122/hr
1 hr
Deposition
Equipment
Internal
External Academic
External Industrial
~Training Time
Angstrom AMOD Evaporator
$69/hr
$103.50/hr
$138/hr
4 hrs
Angstrom Sputter System
$104/hr
$179/hr
$208/hr
4 hrs
Denton BTT - Thermal Evaporator
$94/hr
$145/hr
$188/hr
4 hrs
 Angstrom EvoVac Evaporator
$69/hr
$103.50/hr
$138/hr
4 hrs
Anric AT-410 ALD
$45/hr
$96/hr
$135/hr
3 hrs
ECSI Fibrotools IKO JK Electroplater
$78/hr
$129/hr
$156/hr
3 hrs
Dry Etching and Plasma Ashing
Equipment
Internal
External Academic
External Industrial
~Training Time
Oxford ICP
$106/hr
$159/hr
$212/hr
4 hrs
PVA Tepla Ion 10
$68/hr
$148/hr
$148/hr
1 hr
Thermal Processing
Equipment
Internal
External Academic
External Industrial
~Training Time
ATV PEO 603 Oxidation Furnace
$84/hr
$126/hr
$168/hr
4 hrs
Modulab Oxidation Furnace
$84/hr
$126/hr
$168/hr
4 hrs
Modulab Phosphorus Diffusion Furnace
$84/hr
$126/hr
$168/hr
4 hrs
Lindberg/Blue Boron Diffusion Furnace
$84/hr
$126/hr
$168/hr
4 hrs
Allwin21 AccuTermo AW 610M
$84/hr
$126/hr
$168/hr
4 hrs
Packaging
Equipment
Internal
External Academic
External Industrial
~Training Time
K&S 4523AD Wedge Bonder
$55/hr
$82.50/hr
$110/hr
2 hrs
AML Wafer Bonder
$76/hr
$152/hr
$152/hr
4 hrs
Disco DAD 3221 Dicing Saw
$96/hr
$144/hr
$192/hr
4 hrs
Photonics Packaging
Equipment Internal External Academic External Industrial ~Training Time
Keyence VK-X3000 Laser Scanning Confocal and White Light Interferometer $62/hr $93/hr $124/hr 2 hrs
Tresky T-5300 Chip Placement and Flip Chip Bonder coming soon      
KrellTech Nova Fiber and PIC Polisher coming soon      
Thorlabs PIC Assembly Station coming soon      
Semi-auto PIC Test coming soon      
Metrology and Characterization
Equipment
Internal
External Academic
External Industrial
~Training Time
Filmetrics F3 Reflectometer
$62/hr
$93/hr
$124/hr
1 hr
Dektak XTa Stylus Profilometer
$35/hr
$52.50/hr
$70/hr
2 hrs
Angstrom Sun Ellipsometer
$62/hr
$93/hr
$124/hr
2 hrs
Jandell RM3 Four Point Probe
$45/hr
$67.50/hr
$90/hr
1 hr
Semiconductor Analyzer and Probe Station
$45/hr
$67.50/hr
$90/hr
2 hrs
Wet Benches
Equipment
Internal
External Academic
External Industrial
~Training Time
Acid Process Wetbench
$70/use
$105/use
$140/use
1
Cobleigh 523 General Use Wetbench
$70/use
$105/use
$140/use
1
Cobleigh 525A General Use Wetbench
$70/use
$105/use
$140/use
1
Barnard 107 Base Bench
$70/use
$105/use
$140/use
1
Barnard 107 Solvent Bench
$70/use
$105/use
$140/use
1
Microfluidics
Equipment
Internal
External Academic
External Industrial
~Training Training
Flacktek DAC 330-100 SE Model Mixer
$97/hr
$145.50/hr
$194/hr
0.5 hrs
Harrick HP-001 High Power Cleaner
$97/hr
$145.50/hr
$194/hr
0.5 hrs