Lithography
Equipment
Internal
External Academic
External Industrial
~Training time
ABM Contact Aligner
$55/hr
$82.50/hr
$110/hr
4 hrs
YES III Vapor Prime Oven
$41/hr
$61.50/hr
$82/hr
4 hrs
Solvent/Headway Spinner Bench
$61/hr
$91.50/hr
$122/hr
1 hr
Laurell Spin Coater
$61/hr
$91.50/hr
$122/hr
1 hr
Deposition
Equipment
Internal
External Academic
External Industrial
~Training Time
Angstrom AMOD Evaporator
$69/hr
$103.50/hr
$138/hr
4 hrs
Angstrom Sputter System
$104/hr
$179/hr
$208/hr
4 hrs
Denton BTT - Thermal Evaporator
$94/hr
$145/hr
$188/hr
4 hrs
 Angstrom EvoVac Evaporator
$69/hr
$103.50/hr
$138/hr
4 hrs
Anric AT-410 ALD
$45/hr
$96/hr
$135/hr
 
ECSI Fibrotools IKO JK Electroplater
$78/hr
$129/hr
$156/hr
 
Etching
Equipment
Internal
External Academic
External Industrial
~Training Time
Oxford ICP
$106/hr
$159/hr
$212/hr
4 hrs
PVA Tepla Ion 10
$68/hr
$148/hr
$148/hr
1 hr
Harrick HP-001 High Power Cleaner
$97/hr
$145.50/hr

$194/hr

1 hr
Thermal Processing
Equipment
Internal
External Academic
External Industrial
~Training Time
ATV PEO 603 Oxidation Furnace
$84/hr
$126/hr
$168/hr
4 hrs
Modulab Oxidation Furnace
$84/hr
$126/hr
$168/hr
4 hrs
Modulab Phosphorus Diffusion Furnace
$84/hr
$126/hr
$168/hr
4 hrs
Lindberg/Blue Boron Diffusion Furnace
$84/hr
$126/hr
$168/hr
4 hrs
Allwin21 AccuTermo AW 610M
$84/hr
$126/hr
$168/hr
4 hrs
Packaging
Equipment
Internal
External Academic
External Industrial
~Training Time
K&S 4523AD Wedge Bonder
$55/hr
$82.50/hr
$110/hr
2 hrs
AML Wafer Bonder
$76/hr
$152/hr
$152/hr
4 hrs
Disco DAD 3221 Dicing Saw
$96/hr
$144/hr
$192/hr
4 hrs
Metrology
Equipment
Internal
External Academic
External Industrial
~Training Time
Filmetrics Profilm 3D Optical Profilometer
$35/hr
$52.50/hr
$70/hr
2 hrs
Filmetrics F3
$62/hr
$93/hr
$124/hr
1 hr
Dektak XTa Stylus Profilometer
$35/hr
$52.50/hr
$70/hr
2 hrs
Ellipsometer
$62/hr
$93/hr
$124/hr
2 hrs
Wet Benches
Equipment
Internal
External Academic
External Industrial
~Training Time
Acid Process Wetbench
$70/hr
$105/hr
$140/hr
Included in Fee
Cobleigh 523 General Use Wetbench
$70/hr
$105/hr
$140/hr
Included in Fee
Cobleigh 525A General Use Wetbench
$70/hr
$105/hr
$140/hr
Included in Fee
Barnard 107 Base Bench
$70/hr
$105/hr
$140/hr
Included in Fee
Barnard 107 Solvent Bench
$70/hr
$105/hr
$140/hr
Included in Fee
Miscellaneous
Equipment
Internal
External Academic
External Industrial
~Training Training
Flacktek DAC 330-100 SE Model Mixer
$97/hr
$145/hr
$194/hr
1 hr
Semiconductor Analyzer and Probe Station
$45/hr
$67.50/hr
$90/hr
2 hrs

Unchanged Policies

  • Use of the evaporation and sputter systems may include a setup charge if a target change is required.
  • Material usage fees apply for Au and Pt.
  • Time usage is billed in ¼ hour increments. Round your time fairly. For example, if you work for 20 minutes, recording ¼ hour is acceptable. If you work for 25 minutes, record the time in the logbook as ½ hour.
  • We will assess a one-time fee for our three-hour in-person safety training. You will not be charged a daily access fee on your training day.
  • The above daily access fees will be split evenly among all active projects for the usage month, for each user. 
  • Training fees will be assessed after the first training.

Updated or New Policies

  • According to federal guidelines, we are not allowed to use caps. Therefore, we cannot have a monthly hard cap for academic usage or a monthly soft cap for industrial users. We also are not allowed to cap the daily usage fees to a monthly max maximum. 
    • Academic access fee: $50/day.
    • Commercial access fee: $100/day.
  • We are now charging a small fee for optical microscopes.
  • We now charge training fees based on hours rather than a fixed charge.
  • * - If you are trained on one of these three tools, the training on the remaining two reduces to 1 hr each.