Lab Fees - New Rates Effective April 2026
|
Equipment
|
Internal
|
External Academic
|
External Industrial
|
~Training time
|
|---|---|---|---|---|
|
ABM Contact Aligner
|
$55/hr
|
$82.50/hr
|
$110/hr
|
4 hrs
|
|
YES III Vapor Prime Oven
|
$41/hr
|
$61.50/hr
|
$82/hr
|
4 hrs
|
|
Solvent/Headway Spinner Bench
|
$61/hr
|
$91.50/hr
|
$122/hr
|
1 hr
|
|
Laurell Spin Coater
|
$61/hr
|
$91.50/hr
|
$122/hr
|
1 hr
|
|
Equipment
|
Internal
|
External Academic
|
External Industrial
|
~Training Time
|
|---|---|---|---|---|
|
Angstrom AMOD Evaporator
|
$69/hr
|
$103.50/hr
|
$138/hr
|
4 hrs
|
|
Angstrom Sputter System
|
$104/hr
|
$179/hr
|
$208/hr
|
4 hrs
|
|
Denton BTT - Thermal Evaporator
|
$94/hr
|
$145/hr
|
$188/hr
|
4 hrs
|
|
Angstrom EvoVac Evaporator
|
$69/hr
|
$103.50/hr
|
$138/hr
|
4 hrs
|
|
Anric AT-410 ALD
|
$45/hr
|
$96/hr
|
$135/hr
|
|
|
ECSI Fibrotools IKO JK Electroplater
|
$78/hr
|
$129/hr
|
$156/hr
|
|
|
Equipment
|
Internal
|
External Academic
|
External Industrial
|
~Training Time
|
|---|---|---|---|---|
|
Oxford ICP
|
$106/hr
|
$159/hr
|
$212/hr
|
4 hrs
|
|
PVA Tepla Ion 10
|
$68/hr
|
$148/hr
|
$148/hr
|
1 hr
|
|
Harrick HP-001 High Power Cleaner
|
$97/hr
|
$145.50/hr
|
$194/hr |
1 hr
|
|
Equipment
|
Internal
|
External Academic
|
External Industrial
|
~Training Time
|
|---|---|---|---|---|
|
ATV PEO 603 Oxidation Furnace
|
$84/hr
|
$126/hr
|
$168/hr
|
4 hrs
|
|
Modulab Oxidation Furnace
|
$84/hr
|
$126/hr
|
$168/hr
|
4 hrs
|
|
Modulab Phosphorus Diffusion Furnace
|
$84/hr
|
$126/hr
|
$168/hr
|
4 hrs
|
|
Lindberg/Blue Boron Diffusion Furnace
|
$84/hr
|
$126/hr
|
$168/hr
|
4 hrs
|
|
Allwin21 AccuTermo AW 610M
|
$84/hr
|
$126/hr
|
$168/hr
|
4 hrs
|
|
Equipment
|
Internal
|
External Academic
|
External Industrial
|
~Training Time
|
|---|---|---|---|---|
|
K&S 4523AD Wedge Bonder
|
$55/hr
|
$82.50/hr
|
$110/hr
|
2 hrs
|
|
AML Wafer Bonder
|
$76/hr
|
$152/hr
|
$152/hr
|
4 hrs
|
|
Disco DAD 3221 Dicing Saw
|
$96/hr
|
$144/hr
|
$192/hr
|
4 hrs
|
|
Equipment
|
Internal
|
External Academic
|
External Industrial
|
~Training Time
|
|---|---|---|---|---|
|
Filmetrics Profilm 3D Optical Profilometer
|
$35/hr
|
$52.50/hr
|
$70/hr
|
2 hrs
|
|
Filmetrics F3
|
$62/hr
|
$93/hr
|
$124/hr
|
1 hr
|
|
Dektak XTa Stylus Profilometer
|
$35/hr
|
$52.50/hr
|
$70/hr
|
2 hrs
|
|
Ellipsometer
|
$62/hr
|
$93/hr
|
$124/hr
|
2 hrs
|
|
Equipment
|
Internal
|
External Academic
|
External Industrial
|
~Training Time
|
|---|---|---|---|---|
|
Acid Process Wetbench
|
$70/hr
|
$105/hr
|
$140/hr
|
Included in Fee
|
|
Cobleigh 523 General Use Wetbench
|
$70/hr
|
$105/hr
|
$140/hr
|
Included in Fee
|
|
Cobleigh 525A General Use Wetbench
|
$70/hr
|
$105/hr
|
$140/hr
|
Included in Fee
|
|
Barnard 107 Base Bench
|
$70/hr
|
$105/hr
|
$140/hr
|
Included in Fee
|
|
Barnard 107 Solvent Bench
|
$70/hr
|
$105/hr
|
$140/hr
|
Included in Fee
|
|
Equipment
|
Internal
|
External Academic
|
External Industrial
|
~Training Training
|
|---|---|---|---|---|
|
Flacktek DAC 330-100 SE Model Mixer
|
$97/hr
|
$145/hr
|
$194/hr
|
1 hr
|
|
Semiconductor Analyzer and Probe Station
|
$45/hr
|
$67.50/hr
|
$90/hr
|
2 hrs
|
Unchanged Policies
- Use of the evaporation and sputter systems may include a setup charge if a target change is required.
- Material usage fees apply for Au and Pt.
- Time usage is billed in ¼ hour increments. Round your time fairly. For example, if you work for 20 minutes, recording ¼ hour is acceptable. If you work for 25 minutes, record the time in the logbook as ½ hour.
- We will assess a one-time fee for our three-hour in-person safety training. You will not be charged a daily access fee on your training day.
- The above daily access fees will be split evenly among all active projects for the usage month, for each user.
- Training fees will be assessed after the first training.
Updated or New Policies
- According to federal guidelines, we are not allowed to use caps. Therefore, we cannot
have a monthly hard cap for academic usage or a monthly soft cap for industrial users.
We also are not allowed to cap the daily usage fees to a monthly max maximum.
- Academic access fee: $50/day.
- Commercial access fee: $100/day.
- We are now charging a small fee for optical microscopes.
- We now charge training fees based on hours rather than a fixed charge.
- * - If you are trained on one of these three tools, the training on the remaining two reduces to 1 hr each.
