Laurell Spin Coater

• Properly center your substrate on the chuck to prevent shattering 
• Keep resist and cleaning solvents away from the vacuum inlets on chuck 

The Laurell spin coater can be used to spin coat all MMF-approved resists (e.g. SU-8 series, AZ1500
series, KMPR series, NR9 series). If you would like to use a new resist or material, please get prior
approval from the facility manager. 

The Laurell spin coater is not approved for spin coating PDMS and other materials that might
permanently cure in the equipment. 

1. Check the recipe list on theLaurelllogbookto find a program # that isunclaimed.Choose the firstprogram number that is unclaimed(i.e.if 13 is claimed,choose 14and write the number and your name next on the logbooklist.From now on, this program number is yours.DO NOT EDITOTHER USERS'PROGRAMS. 

2. Press "EDIT MODE"and select your program number.Change the parameters of the program to meetyourspecifications. Use“pgup"and “pgdown"to edit each category. 

3. Center your substrate on the chuck. 

4. Turn onthesubstrate vacuum by pressingthe "Vacuum"button. 

5. Press "Run Mode"and select your program number. 

6. Press “Start". 

7. Afterthespin sequence is complete, liftlid slowly to allowresist to run off the backside of the cover toprevent drops on your substrate.  

8. (Optional)Use a “cleanq-tip” wetted with acetone (or other solvent) to clean the edge beadoff ofthe substrate. 

9. Switch off vacuum by pressing "Vacuum"button. 

10. Remove substrate.

1. Clean the Laurell with acetone on cleanroom wipes. (If you used SU-8, SU-8 developer will work
   better than acetone.) There should be no photoresist residue left on the spin coater.
2. Close the lid to the spin coater bowl.
3. Check again if the waste container directly behind spinner is full
   1. If the waste container is full, carefully unscrew the container by rotating
      counterclockwise.
   2. Dump contents of container into the solvent waste drain on the solvent bench.
   3. Wipe off rim of container with acetone to prevent photoresist crust from forming on the
      threads.
   4. Screw waste container back into the spinner by rotating clockwise.

• The Laurell spin coater will not spin when I press start
• Has the vacuum button been pressed?
• Is the vacuum valve to the spin coater on the back of the bench turned on?
• Is the house vacuum pump turned on?
• The Laurell did not stop when it should have.
• You probably started the recipe in “EDIT MODE” rather than “RUN MODE”. Depending
  on your process, you may need to rework your wafer.