For any student who wishes to use the Montana Microfabrication Facility, they are required to first take these courses to learn the fundamentals of microfabrication and its procedures.
EELE 407 - Introduction to Microfabrication
This course provides an introduction to clean room safety protocol and micro fabrication. Lectures will introduce micro fabrication methods, models and equipment. Laboratories will perform the steps to produce and characterize a metal-oxide-semiconductor transistor.
Introduction to Microelectronic Fabrication 2e, (Required)
by Richard C. Jaeger
Prentice Hall, 2002
PHSX 207 or 222
EELE 408 - Photovoltaic Systems
This course covers the physics of solar cells, their fabrication, and system applications such as alternative energy systems and satellite power.
Applied Photovoltaics, (Required)
by Wenham, Green, Watt, & Corkish
EELE 505 - MEMS Sensors and Actuators
This course introduces students to microfabrication of electrical and mechanical devices. The theory of various mechanical transducers and physical sensors including optical MEMS, RF MEMS, and Bio/Chemical MEMS are discussed.
Practical MEMS, (Required)
by Ville Kaajakari
Small Gear Publishing, 2009
EELE 409 or equivalent