YES III Vapor Prime Oven
![Photo of Yes 3 Vapor Prime Oven](/old-images/equipment/YES-HMDS-Oven-400x300.jpg)
Description
The yield engineering YES II vapor prime oven is used to coat substrates with HMDS to improve resist adhesion for standard positive photoresists.
Processes
HMDS coating
- Load wafers in YES LP-III vapor prime oven and press start.