YES III Vapor Prime Oven
Description
The yield engineering YES II vapor prime oven is used to coat substrates with HMDS to improve resist adhesion for standard positive photoresists.
Montana Microfabrication Facility(RRID:SCR_026333)
Cobleigh and Barnard Hall
Montana State University
P.O. Box 173400
Bozeman, MT 59717
Facility Manager:
Dr. Andrew Lingley
Montana State University
518 Cobleigh Hall
Bozeman, MT 59717
Phone: (406) 994-2518
Email: andrew.lingley@montana.edu
Facility Director:
Dr. David Dickensheets
Montana State University
530 Cobleigh Hall
Bozeman, MT 59717
Phone: (406) 994-7874
Email: davidd@montana.edu
Student Offices:
540 Cobleigh Hall
Phone: (406) 994-3112