Lithography

Equipment
AB-M contact aligner
YES III vapor prime oven
Solvent/Headway spinner bench
EMS Hotplate
TrioTech Hotplate
Laurell Spin Coater
CEE Spin Coater and hotplate

Polos Hotplate


Deposition

Equipment
Amod Evaporator
Angstrom Sputter System
Denton BTT - Thermal Evaporator
EvoVac Evaporator


Etching

Equipment
Oxford ICP
PVA Tepla Ion 10
Harrick HP-001 High Power Plasma Cleaner


Thermal Processing


Packaging

Equipment
K&S 4523AD Wedge Bonder
AML Wafer Bonder
Disco DAD 3221 Dicing Saw


Metrology

Equipment
Filmetrics Profilm 3D optical profilometer
Filmterics F20
Filmetrics F3
Dektak XTa Stylus Profilmeter


Wet Benches

Equipment
Acid process wetbench
Cobleigh 523 General Use Wetbench
Cobleigh 525A General Use Wetbench
Barnard 107 Base Bench
Barnard 107 Solvent Bench


Miscellaneous

Equipment
MRL oxidation
Crest ultrasonic cleaner
COMSOL FEA
Flacktek DAC 330-100 SE Model Mixer