All Equipment
Lithography
Equipment |
---|
AB-M contact aligner |
YES III vapor prime oven |
Solvent/Headway spinner bench |
EMS Hotplate |
TrioTech Hotplate |
Laurell Spin Coater |
CEE Spin Coater and hotplate |
Deposition
Equipment |
---|
Amod Evaporator |
Angstrom Sputter System |
Denton BTT - Thermal Evaporator |
EvoVac Evaporator |
Etching
Equipment |
---|
Oxford ICP |
PVA Tepla Ion 10 |
Harrick HP-001 High Power Plasma Cleaner |
Thermal Processing
Equipment
|
---|
Packaging
Equipment |
---|
K&S 4523AD Wedge Bonder |
AML Wafer Bonder |
Disco DAD 3221 Dicing Saw |
Metrology
Equipment |
---|
Filmetrics Profilm 3D optical profilometer |
Filmterics F20 |
Filmetrics F3 |
Dektak XTa Stylus Profilmeter |
Wet Benches
Equipment |
---|
Acid process wetbench |
Cobleigh 523 General Use Wetbench |
Cobleigh 525A General Use Wetbench |
Barnard 107 Base Bench |
Barnard 107 Solvent Bench |
Miscellaneous
Equipment |
---|
MRL oxidation |
Crest ultrasonic cleaner |
COMSOL FEA |
Flacktek DAC 330-100 SE Model Mixer |