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Description

The Brewer 100CB is a programmable spin coater and hotplate.

 

Processes

Spin Coating

 

Links

Operating Manual 

1. Using alignment fixture, load and center wafer on chuck: Alignment fixture can be adjusted for 3" and 4" wafers.

2. Choose desired recipe by pressing 'OPT' button until 'CEE 100CB AUTO DISP appears on screen.

3. Press 'RUN' button followed by the number of the desired recipe and then 'ENTER'. Coater will rotate wafer and ask to verify wafer centering.

4. Press 'START' when ready to begin spin coating and dispense photo resist at appropriate time in spin recipe.

5. If part of spin recipe, for edge bead removal step apply Edge Bead Remover (EBR) to wafer using Q-tip swabs. Unload wafer and press Reset to silence end of process.

6. For brewer 115 C soft bake, press 'OPT' button until 'CEE 100CB HOTPLATE' appears on screen. Press 'RUN' followed by the desired baking program number and then 'ENTER'. Press 'START" and place wafer on hot plate.

7. Unload wafer from hot plate upon completion of bake.

8. Remeber to replace orance absorbent pad in spinner bowl and rinse any residue in bowl with EBR.

9. Log machine use in the Log book located on the ground next to the Brewer Spinner Bench.

 

Click here to download Operating Manual and Procedures PDF