Etching Equipment
| Equipment | Associated Process(es) |
|---|---|
| Oxford ICP | Cryogenic etch |
| March 1703 | |
| PVA Tepla Ion 10 | O2 Descum R1 S1813 on Si ashing R2 S1813 on Al Ashing R3 S1813 on Si Descum R4 S1813 on Al Descum |
Facility Manager:
Dr. Andrew Lingley
Montana State University
518 Cobleigh Hall
Bozeman, MT 59717
Phone: (406) 994-2518
Email: andrew.lingley@montana.edu
Facility Director:
Dr. David Dickensheets
Montana State University
530 Cobleigh Hall
Bozeman, MT 59717
Phone: (406) 994-7874
Email: davidd@montana.edu
Student Offices:
111 Barnard Hall
Phone: (406) 994-3112