SEMITOOL SPD015 Operating Instructions

  1. Make sure that the MAIN and SYS lights are green on the oxidation wet bench.
  2. Turn on the appropriate controller for the SRD bowl using the ON/OFF switch.
  3. While pressing the Door Release Latch button, open the desired door and insert wafer or mask holder cassette. Close door while still holding the Door Release Latch button until door is secure.
  4. Press Start button for desired spin rinse dryer.
  5. When cycle is complete, open door while holding Door Release Latch button, and remove wafer or mask holder cassette. Verify that the rotor stopped in an upright position. Close the door while continuing to hold Door Release Latch button until door is secure.
  6. Turn off the ON/OFF switch.

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