Turn off the water chiller located in the service perimeter, This must be turned off
to prevent glycol leaks
Vent the main chamber
Turn off all pumps
Remove all foil
Remove the shields that are lining the chamber. There are 9 of these and you need
to detach the sample shutter and the glow discharge rod to remove the ceiling shields
Unscrew the bolts securing the copper plate covering the crucible liners Remove this and place to the side, making sure to keep track of the two o-rings
Unscrew the bolts securing the copper crucible holder, remove and set to the side
while keeping track of the one o-ring
Remove the mirror mount
Take the two copper pieces, the mirror mount, and the sample plate to the physics
machine shop located on the second floor and bead blast the pieces to remove deposition
materials.
Thoroughly rinse these in water before returning to the clean room
Once in the clean room, rinse the pieces in water, wipe down with acetone and follow
with an IPA rinse.
Bake the pieces in the oven located next to the Modulab Thermal Evaporator for at
least twenty minutes to bake off any remaining water vapor.
Re-line the chamber with the proper shields
Re-foil any exposed areas
Replace the o-rings making sure that they are laying flush against the fittings
Replace the crucible holder and firmly screw in
Replace the crucible cover and firmly screw in, the o-rings associated with the cover
occasionally require some vacuum grease to form a good seal
Seal the chamber and select full pump down
Let the chamber reach 5e^-6 Torr before restarting the water chiller. If the chamber
cannot reach this pressure after several hours there is probably a leak in either
the crucible cover or the crucible holder
Remember to update the materials in the Amod Control Software and to change the magnet
indicator
Facility Manager: Dr. Andrew Lingley Montana State University 518 Cobleigh Hall Bozeman, MT 59717 Phone: (406) 994-2518 Email: andrew.lingley@montana.edu
Facility Director: Dr. David Dickensheets Montana State University 530 Cobleigh Hall Bozeman, MT 59717 Phone: (406) 994-7874 Email: davidd@montana.edu
Student Offices: 111 Barnard Hall Phone: (406) 994-3112