R1 S1813 on Si ashing
No faraday cage; wafer in vertical position, centered in chamber
1.3um S1813 on 100mm Silicon wafer
Ash time 4 min
Montana Microfabrication Facility(RRID:SCR_026333)
Cobleigh and Barnard Hall
Montana State University
P.O. Box 173400
Bozeman, MT 59717
Facility Manager:
Dr. Andrew Lingley
Montana State University
518 Cobleigh Hall
Bozeman, MT 59717
Phone: (406) 994-2518
Email: andrew.lingley@montana.edu
Facility Director:
Dr. David Dickensheets
Montana State University
530 Cobleigh Hall
Bozeman, MT 59717
Phone: (406) 994-7874
Email: davidd@montana.edu
Student Offices:
540 Cobleigh Hall
Phone: (406) 994-3112