Oxford ICP Etcher

  • The Oxford Plasmalab ICP 100 uses CHF3, oxygen and argon to etch lithium niobate.
  • The etch rate seems to vary significantly but was measured at about 20 nm/min.
  • As etch time increases the etch seems to slow as a passivation layer is formed on the lithium niobate sample.

Attached Documents

  • application/pdf iconLithium Niobate Etch Recipe.pdf