Chromium Dry Etch Recipe
- The chromium dry etch recipe utilizes a chlorine and oxygen chemistry to etch the metal.
- The Oxford ICP 100 etcher is used with this recipe, and the etch rate is about 25 nm/min.
Attached Documents
Chromium Etch Recipe.pdf
![Cr on Glass 4 min Etch Cr on Glass 4 min Etch](/old-images/processes/Cr%20on%20glass%204m%204%20comp_0.big%20thumbnail.jpg)
![Oxford ICP Etcher Oxford ICP Etcher](/old-images/equipment/oxford_icp_etcher1.big%20thumbnail.jpg)
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